I-Silicon Carbide Cantilevers Paddle
Imininingwane yomkhiqizo nokusetshenziswa kwayo
I-wafer enkulu yokulayisha amandla we-silicon carbide i-SiSiC / SiC cantilever paddle / ugongolo ilungele irobhothi ukulayisha ngokuzenzekelayo nokuphatha uhlelo ngoba inokusebenza okuzinzile, okungahambisani nokushisa okuphezulu namandla amakhulu wokulayisha we-wafer. Njengoba isigaba se-cantilever paddle sizinzile ngaphandle kokukhubazeka, kungenzeka ukwenza usayizi omkhulu wokubhaka usebenzisa amashubhu esithandweni somlilo akhona. I-wafer enkulu yokulayisha amandla we-silicon carbide i-SiSiC / SiC cantilever paddle / ugongolo ingasetshenziswa ku-LPVCD ngesisekelo sokulingana kwayo kokushisa okushisayo okuhambisana nokufakwa kwe-LPVCD, okwandisa kakhulu umjikelezo wokugcinwa nokuhlanzwa, futhi kunciphise kakhulu ukungcola.
Amapharamitha wezobuchwepheshe we-reaction bonded silicon carbide RBSIC:
| into | iyunithi | idatha |
| Ukushisa kwesicelo | ℃ | 1380 |
| ukuminyana | G / cm3 | > = 3.02 |
| Vula porosity | % | <0.1 |
| Isilinganiso Sobunzima bukaMoh | 13 | |
| Amandla okugoba | UMpa | 250 (20 ℃) |
| UMpa | 280 (1200 ℃) | |
| I-Modulus yokuqina | I-Gpa | 330 (20 ℃) |
| I-Gpa | 300 (1200 ℃) | |
| Ukuqhuba okushisayo | W / mk | 45 (1200 ℃) |
| Coefficient yokwanda ezishisayo | I-K-1 * 10-6 | 4.5 |
| I-alkaline enobufakazi be-acid | Kuhle kakhulu |
Izici:
a. Ayikhubazi ekushiseni okuphezulu futhi amandla okulayisha alula kakhulu;
b. Ukumelana nokushaqeka okushisayo nempilo ende yokusebenza;
c. I-coefficient yokunwetshwa okushisayo kwe-cantilever paddle incane ngokwedlulele, okwandisa kakhulu umjikelezo wokugcinwa nokuhlanzwa;
futhi sinciphise kakhulu ukungcola
Enye ifenisha yomlilo eyenziwe nge-silicon carbide ceramic
Ngaphandle kwe-Reaction sintered silicon carbide SiSiC cantilever paddle for wafer loading, siphinde sikhiqize enye ifenisha yomlilo kufaka phakathi i-RBSIC / SISIC silicon carbide imishayo, amashubhu wombhobho, ishubhu lombhobho womoya, ishubhu yombhobho we-swirl, i-oxide eboshwe i-SIC silicon carbide batts / ipuleti le-RBSIC yokupholisa .
Gqoka imikhiqizo emelana ne-RBSIC / SISIC silicon carbide
Ngoba umkhiqizo wethu we-RBSIC / SISIC silicon carbide unezinzuzo zokumelana nokugqoka okuhle, ukumelana nokugqwala kanye nempilo ende, futhi kungenziwa kube yizindwangu zokugqoka ezingafakwa kalula ekucubunguleni amapayipi noma izivunguvungu.
